Thermal Decomposition of Hafnium Ethoxide-Mollecular Precursor for Hafnia Dielectric Thin Films Journal title: Analele Universitatii "Dunarea de Jos" din Galati. Fascicula IX, Metalurgie si Stiinta Materialelor Authors: Elena Emanuela VALCU (HERBEI), Viorica MUSAT, Timothy LEEDHAM Subject(s):