A COMPARITIVE ANALYSIS ON NANOWIRE BASED MEMS PRESSURE SENSOR
Journal Title: Indian Journal of Computer Science and Engineering - Year 2012, Vol 3, Issue 2
Abstract
This paper compares a MEMS Piezoresistive pressure sensor which utilizes a circular and square shaped polysilicon diaphragm with a nanowire to enhance the sensitivity of the pressure sensor. The nanowires for both the sensors form the bridge between the diaphragm assembly. The high Piezoresistive effect of polysilicon nanowires is used to enhance the sensitivity. The circular and square shaped polysilicon diaphragm with nanowire which are like piezoresistor were fabricated by means of RIE(reactive ion etching). This paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique. The polysilicon nanowire has a thickness about 10nm. Finite element method is adopted to optimize the sensor output and to improve the sensitivity of both the circular and square shaped polysilicon diaphragm with nanowire to form Piezoresistive pressure sensor. The best position to place the Polysilicon nanowires to receive maximum stress was also considered during the design process. It was found that the fabricated square polysilicon diaphragm with nanowire has the highest sensitivity of about 156mV/VKPa were as the circular polysilicon pressure sensor gave a sensitivity of about 133 mV/VKPa.
Authors and Affiliations
S. Maflin Shaby , A. Vimala Juliet
Keywords
Related Articles
- EP ID EP135136
- DOI -
- Views 112
- Downloads 0
COMPARISON OF NORMAL SELFISH OVERLAY NETWORK AND SELFISH OVERLAY NETWORK WITH DEPLOYMENT OF OVERLAY NODES USING FUZZY LOGIC
Selfish overlay routing is the technique whereby the sender of the packet can specify the route that the packet should take through the network. Selfish overlay routing allow end users to select routes in an egocentic fa...
MSA AGENT FOR MULTIMEDIA APPLICATIONS
The MSA Agent is the software developed to design rectangular and U slotted micro strip antenna. It is applied for the various applications such as satellite communications, UHF applications. Within the multimedia freque...
Performance Evolution of Various Wavelets in Cervical Lesion Detection
Cervical cancer is one of most common cancers among women in the world caused by human papilloma virus infection. It develops in the tissue of cervix which connects upper body of the uterus to the vagina. The types of ca...
DEVELOPING A SECURITY PROTOCOL FOR A WIRELESS COMPUTER VIRTUAL LABORATORY (WCVLAB)
For a Virtual Computer Laboratory (VCLAB) to operate effectively within a Wireless intranet setup, a lot of protocols are employed to function. This write-up is aimed at developing a protocol to secure a Wireless Compute...
ADVANCES AT A GLANCE IN PARALLEL COMPUTING
In the history of computational world, sequential uni-processor computers have been exploited for years to solve scientific and business problems. To satisfy the demand of compute & data hungry applications, it was o...