Analysis and Experiment of MEMS based Micropump for Microfluidic Application
Journal Title: International Journal of Advanced Research in Computer Engineering & Technology(IJARCET) - Year 2012, Vol 1, Issue 10
Abstract
In this paper, we have addressed the issues related to the design and simulation of MEMS based silicon micro-needles for insertion of fluid into the dermis and subcutaneous fat layer of human skin. Microelectromechanical systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and microfluidic devices .Green interactions between liquids and microscale structures can lead to volatile performance of MEMS in liquid environments. In this paper, the design and fabrication of a multi- material high-performance micropump is presented. The micropumps are fabricated using MEMS fabrication techniques, comprised of silicon and Pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated silicon-oninsulator (SOI) and glass micromachined substrates using eutectic bonding and anodic bonding processes were successfully realized a n d p r o v i d e a r o b u s t a n d scalable production technique for the micro pump. Exceptional flow rates of 0.1 ml/min with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization.
Authors and Affiliations
K. Ganesan , Dr. V. Palanisamy
Keywords
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