Design & Analysis of RF MEMS capacitive switches manufacturing process on the coplanar waveguide
Journal Title: International Research Journal of Applied and Basic Sciences - Year 2013, Vol 4, Issue 7
Abstract
In this paper, we design and simulate RF MEMS switch in suspension bridge mode. We chose the transmission line of type CPW. First, by using TX LINE2003 software, we have designed and calculated the dimensions of transmission line for having characteristic impedance 50. We have chosen the substrate made of silicon, conductor of transmission line of made of cooper, dielectric layer made of SiO2, and upper electrode (bridge) made of aluminum. We simulate the manufacturing process of the switch in Intellisuite software. We have chosen 3 forms for upper electrode (bridge) format and we performed thermo-electromechanical analysis for each case. In each case, we measure the pull-down voltage and compare them with each other. According to results, it is shown that form a ,is more relevant for choosing the bridge.
Authors and Affiliations
Gholamhosein moloudian*| Sama Technical and vocational traning collage,Islamic Azad Universiy , Kazeroun Branch , Kazeroun, Iran, gholamhosein_movludian@yahoo.com, Asghar ebrahimi| Malek Ashtar University Of Technology
Keywords
Related Articles
- EP ID EP5561
- DOI -
- Views 302
- Downloads 12
The Mutual Relationship of Men and Women in IslamicReligion
The current paper investigates the interactive and mutual relationship of men and women (spouse) from should points of view. Human commitment and responsibility is among the important issues in Islamic text books and has...
The Importance of Family Formation from the Perspective of Quran and Hadith
A family consists of a group of two people or more related by birth, marriage, or adoption and residing together. Family in most human societies is the principal institution for the socialization of children. Family is t...
Numerical simulation of weld pool shape during laser beam welding
A three-dimensional transient numerical model was developed to study the temperature field and molten pool shape during continuous laser keyhole welding. The volume-of-fluid (VOF) method was employed to track free surfac...
Investigation of Seed Germination and Seedling Characteristics of Safflower Variety Under Salt Stress Conditions
In order to study the effect of salinity stress on germination and early seedling growth of six safflower genotypes namely FERAMAN, SINA, KM12, KM19, SIRIN and Kose by using five concentrations of NaCl (0, -0.3, -0.5, -1...
Designing and Organizing Darbeno Neighborhood in Gorgan using Neighborhood Values Approach
studied topic is about designing and organizing of Darbeno neighborhood in Gorgan using neighborhood value approach. Value neighborhood has variables such as the value of urban architecture (edges, nodes, routes, areas,...