DUAL-PORT SAW SENSOR WITH ZNO NANORODS AS SENSING ELEMENT
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2015, Vol 12, Issue 1
Abstract
Highly-sensitive dual-port SAW sensor on 128YX – LiNbO3 substrate with sensing element based on ZnO nanorods was proposed in the research. Low-temperature ZnO nanorods synthesis technology was developed, morphometric characteristics of ZnO nanorods were investigated by scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis. Physical models of SAW sensor and SAW sensor with ZnO nanorods were built, sensitivity of such sensors was analyzed by finite element method. It was shown that SAW sensor had the sensitivity of 3.89·10-15 g/Hz to mass load, and sensitivity increased to 6.24·10-17 g/Hz on application of ZnO nanorods
Authors and Affiliations
V. Ulianova, A. Orlov, O. Bogdan, G. Pashkevich
Keywords
Related Articles
- EP ID EP399047
- DOI 10.18524/1815-7459.2015.1.104486
- Views 77
- Downloads 0
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