Abstract

We used EEDF software package program to solve Boltzmann equation to calculate the electron energy distribution function in (50% SF6 – 50% Xe) mixture. The calculations are achieved under a steady state electric field using the classical two - term approximation. The electron energy distribution function (EEDF) and the corresponding transport coefficients (mean electron energy, characteristic energy, mobility of electron, diffusion coefficient, and drift velocity) for constant and various electron concentrations are calculated and graphically represented. It is found that variations of electron concentration have a significant effect on transport coefficients of the mixture. The work is in a well agreement with previously experimental and computational researches.

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