Pull-in Voltage Analysis of Fixed Free Cantilever Beam
Journal Title: UNKNOWN - Year 2014, Vol 1, Issue 1
Abstract
This work focuses on the nonlinear dynamics of fixed-free cantilever beam under electrostatic actuation. Electro statically actuated micro devices experience a fundamental limit on their stable travel range due to a phenomenon called as the pull-in Instability. Accurate evaluation of the pull-in voltages is vital in the design of electro statically actuated MEMS devices. The design simulations of MEMS based micro-cantilever made up of single crystal silicon using FEM (COVENTERWARE) is done. The design of the cantilever structure have been optimized with finite element method based simulation in COVENTERWARE platform.
Authors and Affiliations
Deeksha Chandola, Gaurav Garg
Keywords
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