SEMICONDUCTOR INTEGRATED ELEMENTS BASED ON NANOSTRUCTURES SILICON FOR INFORMATION SYSTEMS
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2015, Vol 12, Issue 1
Abstract
In this paper we consider the accelerometer sensor, which is made using the combined technology of silicon-on-insulator and silicon nanowires. On its basis a fast-response, high-speed, highly sensitive to acceleration and displacement a device was developed with submicron and topological nanometer dimensions. This made it possible to implement as a discrete device or element of nanoelectromechanical systems integrated with the structure of silicon-on-insulator, which provides control of movement with an accuracy of 200 nm
Authors and Affiliations
A. A. Druzhinin, I. T. Kogut, A. Yu. Khoverko, V. I. Golota, Yu. M. Khoverko
Keywords
Related Articles
- EP ID EP399082
- DOI 10.18524/1815-7459.2015.1.107702
- Views 76
- Downloads 0
STATE, PROBLEMS AND WAYS OF SCIENCE DEVELOPMENT IN UKRAINE
The article deals with the analysis of affairs in the scientific field in Ukraine as a whole, as well as in academic and university science. The problems related to the choice of priority directions of research in view o...
OF IMITATION OF THE OPTICAL LOCATION DEVICE UNIFORM MOTION
The aim of the work is to develop a method of physico-mathematical modeling of opticalelectronic systems functioning conditions that solve the problem of reducing the time and cost of experimental studies. The main idea...
CHAOTIC DYNAMICS OF THE SEMICONDUCTOR GAAS / GAALAS LASER WITHIN NONLINEAR CHAOS-GEOMETRIC INFORMATION ANALYSIS
Using universal chaos-geometric and multisystem approach it is studied chaotic dynamics of the nonlinear processes in low- and high dimensional dynamics of a chaos generation in the semiconductor GaAs / GaAlAs laser devi...
SPECTROSCOPY OF ATOMS IN A STRONG LASER FIELD: NEW METHOD TO SENSING AC STARK EFFECT, MULTIPHOTON RESONANCES PARAMETERS AND IONIZATION CROSS-SECTIONS
The resonant multiphoton resonances shifts and widths and ionization cross-sections for multielectron atoms in a intense laser radiation field are studied. It is carried out a new consistent approach to atom in a strong...
OPTICAL MULTISENSOR BASED ON W AND NI OXIDE FILMS FOR THE DETERMINATION OF CO AND H2 CONCENTRATION
An optical sensor for the determination of H2 and CO concentration in a mixture with air has been developed. The sensor has an explosion-proof design, which is achieved by the use of an optical measurement scheme. Tests...