STRUCTURE AND OPTICAL PROPERTIES OF CDTE FILMS OBTAINED BY MAGNETRON SPUTTERING
Journal Title: Сенсорна електроніка і мікросистемні технології - Year 2016, Vol 13, Issue 3
Abstract
The aim of this study was to determine the influence of physical and technological condensation modes of cadmium telluride (CdTe) films obtained by direct current magnetron sputtering on their crystal structure and optical properties. The structure of CdTe films was investigated by X-Ray diffractometry methods with automatic recording of X-ray spectra in scanning θ-2θ mode and “oblique” filming. Optical properties of CdTe layers were studied using a SF-2000 spectrophotometer. The values of layer thickness and band gap of CdTe films were determined. It is found that the method of DC magnetron sputtering with preheating target provides a rate of CdTe film deposition of 150-200 nm/min. It is shown that the conditions of DC magnetron sputtering condensation such as pressure of an inert gas Parg=1-0.9 Pa, plasma discharge current I=80 mA and the magnetron voltage V=600 V during 25 minutes allow to obtain textured hexagonal CdTe layers with a thickness of 4900-5100 nm. The band gap of the obtained CdTe films was 1.52-1.54 eV. Such films of CdTe intensively absorb light in the infrared spectrum and can be used to create optical sensors. After the chloride treatment followed by annealing in air at a temperature 4300C for 25 minutes studied CdTe films due to wurtzite-sphalerite phase transition contain only the stable cubic phase| with lattice parameter a=6,4905 Å, which differs from the tabular valueless than 0.2%.
Authors and Affiliations
G. S. Khrypunov, G. I. Kopach, M. M. Harchenko, A. I. Dobrozhan
Keywords
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- EP ID EP397118
- DOI 10.18524/1815-7459.2016.3.78644
- Views 92
- Downloads 0
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