Accurate Dielectric Capacitance Determination from MetalInsulator-Semiconductor Devices Having Bias and Frequency Dependent Conductance Due To Leakage Current
Journal Title: IOSR Journals (IOSR Journal of Electrical and Electronics Engineering) - Year 2017, Vol 12, Issue 1
Abstract
A model for MIS device in accumulation is proposed which includes a bias and frequency dependent conductance in parallel with the insulator capacitance due to the leakage current. The model is validated by experimental results on MOS structures fabricated on n<100>Si having about 9 nm dry thermal oxide. The real and imaginary impedance versus frequency plots of such MOS device having large conductance can be used to determine accurately the oxide capacitance and consequently the oxide thickness without the use of ellipsometer. Greatly reduced MIS dot area can assist in avoiding frequency dispersion in accumulation capacitance, particularly at small-signal frequency of 1 MHz which is commonly used for generating high frequency C-V plots.
Authors and Affiliations
Ravi Kumar Chanana
Keywords
Related Articles
- EP ID EP388991
- DOI 10.9790/1676-1201010105.
- Views 126
- Downloads 0
Implementation of New Three Phase Modular Multilevel Inverter for Renewable Energy Applications
This project proposes a new three-phase modular multilevel inverter (MMLI) for renewable applications. The cascaded multilevel inverters are the most favourable topologies of multilevel converters. This project introduce...
Application of Root Mean Square and Adaptive NeuroFuzzyInference Systemfor Power Quality Events Classification Using Electricaland Electronics Home Appliances as Case Study
The proliferation of sensitive equipment and non-linear loads atbothindustrial and domestic environment is extremely higher nowadays. This invariably contributes immensely topower quality issues on electric power system...
Performance Analysis of PV Solar Power System
The state of Chhattisgarh is blessed with high solar radiation intensity and has capacity for large solar energy generation. With increasing energy demand and rapid use of fossil fuel has made pressure on thermal power g...
Intelligent Secured Garage for Smart Buildings
Huge traffic in INDIA is due to improper parking system at various places like theatres, apartments, supermarkets etc. This forces the people to park their vehicle on roads. The present project work deals with the automa...
Academic Study Trends in Engineering and Basic Science
In this study, engineering, numerical sciences, mathematical statistics and technological studies conducted by the academic staff of Bitlis Eren University have been evaluated. The main purpose here is to determine the a...