Study of Cerium Doped Diamond Films
Journal Title: 河南科技大学学报（自然科学版） - Year 2018, Vol 39, Issue 6
Abstract
Ce-doped diamond films were deposited through the microwave plasma chemical vapor deposition ( MPCVD) system. The doped diamond films were characterized by time of flight secondary ion mass spectrometry ( TOF-SIMS) and X-ray photoelectron spectroscopy ( XPS) . The results show that in the depth direction of the diamond film, the mass fraction of Ce element presents a gradient distribution and the maximum value is on the surface. When the Ce doping fluxes is 30 m L/min, 45 m L/min and 60 m L/min respectively, the mass fraction of Ce in the doped diamond film samples is 0. 53%, 0. 86% and 1. 34%, respectively.
Authors and Affiliations
Xuejie LIU, Yuchen WANG, Pengfei LU
Keywords
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