Integrated structure for a resonant micro-gyroscope andaccelerometer
Journal Title: Frattura ed Integrità Strutturale - Year 2014, Vol 8, Issue 29
Abstract
This paper presents the study of the mechanical behavior of a microstructure designed to detectacceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by theThELMA© surface-micromachining technique, bases detection of two components of external acceleration (onein-plane component and one out-of plane component) and two components of angular velocity (roll and yaw)on the variation of frequency of several elements set in resonance. The device, despite its small dimensions,provides a differential decoupled detection of four external quantities thanks to the presence of four slenderbeams resonating in bending and four torsional resonators.
Authors and Affiliations
V. Zega, C. Comi, A. Corigliano
Keywords
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- EP ID EP105140
- DOI 10.3221/IGF-ESIS.29.29
- Views 59
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